Field proven technology
Supplied > 600 systems for memory & System LSI mass manufacturing
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2X nm(Memory) : LP TEOS, MS MTO, POLY (CD/DS/NS/SEED POLY), ALD SiN, HCD ALD SiO/SiN, ZrO |
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1X nm (Logic) : ALD SiN, HCD ALD SiO/SiN |
Converting old eguipment for new technology demand
New Process Equipment
Customer Cost Savings <40%
Shortest Leadtime
Best Technology Services
ZensM Technology Background
Refurbish Process
